Design, Modeling and Control of Nanopositioning Systems by Kam K. Leang, Andrew J. Fleming

Design, Modeling and Control of Nanopositioning Systems

Advances in Industrial Control

Kam K. Leang, Andrew J. Fleming

411 pages missing pub info (editions)

nonfiction art technology challenging informative medium-paced
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Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning pr...

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